From rostam at snf.stanford.edu Mon Jun 2 18:13:06 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 2 Jun 2008 18:13:06 -0700 Subject: Shutdown svgdev SNF 2008-06-02 18:13:06: wafer broke Message-ID: wafer broke. I can't get all the pieces out. The wafer was a FZ 500 um thick wafer w/ no trenches. From vilanova at snf.stanford.edu Tue Jun 3 07:55:23 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Jun 2008 07:55:23 -0700 Subject: Shutdown svgdev SNF 2008-06-02 18:13:06: wafer broke Message-ID: removed broken wafer pieces, cleaned catch cup and belts cycled wafers , ok to use . From rostam at snf.stanford.edu Thu Jun 12 18:41:56 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Thu, 12 Jun 2008 18:41:56 -0700 Subject: Shutdown svgdev SNF 2008-06-12 18:41:55: wafer broke Message-ID: track couldn't see my wafer. I tried to pick it up with tweezers; while moving it out, track saw it and sucked it down and the wafer broke. I got out as many pieces as I could. From vilanova at snf.stanford.edu Fri Jun 13 07:29:32 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 13 Jun 2008 07:29:32 -0700 Subject: Shutdown svgdev SNF 2008-06-12 18:41:55: wafer broke Message-ID: removed broken wafer pieces, cleaned catch cup and wafer sensors, cycled wafers, ok to use. From ccwan at snf.stanford.edu Mon Jun 16 15:27:29 2008 From: ccwan at snf.stanford.edu (ccwan at snf.stanford.edu) Date: Mon, 16 Jun 2008 15:27:29 -0700 Subject: Shutdown svgdev SNF 2008-06-16 15:27:23: Dispenser arm stucked Message-ID: wafer didn't go to the dispenser properly. Thus I took away the wafer and now the dispenser arm is stucked. From mahnaz at snf.stanford.edu Mon Jun 16 16:10:31 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 16 Jun 2008 16:10:31 -0700 Subject: Shutdown svgdev SNF 2008-06-16 15:27:23: Dispenser arm stucked Message-ID: meant for svgcoat. From vilanova at snf.stanford.edu Mon Jun 23 07:52:49 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Jun 2008 07:52:49 -0700 Subject: Comment svgdev SNF 2008-06-23 07:52:49: `Out of Developer Ldd26W Message-ID: Students report it to me that the developer tyrack wasnt working I checked the canister and it was empty , I went to get more developer but the yellow cabinet was empty I,m waiting for David to re stock the cabinet.............. 7:52AM From vilanova at snf.stanford.edu Mon Jun 23 08:18:56 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Jun 2008 08:18:56 -0700 Subject: Comment svgdev SNF 2008-06-23 07:52:49: `Out of Developer Ldd26W Message-ID: Developer tracks canister has been refill , ready to use. From king at snf.stanford.edu Wed Jun 25 01:02:08 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 25 Jun 2008 01:02:08 -0700 Subject: Problem svgdev SNF 2008-06-25 01:02:07: belts aren't moving well Message-ID: From vilanova at snf.stanford.edu Wed Jun 25 07:18:26 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Jun 2008 07:18:26 -0700 Subject: Problem svgdev SNF 2008-06-25 01:02:07: belts aren't moving well Message-ID: cleaned & removed resist residues from belts ( belts are moving normal now ) , hotplates,and pulleys , adjusted air flow to one of the wafer sensors on the hotplate station cycled wafers ( 10 each ) checked canister, (canister was full to the top ) , Ok to use. From ahazeghi at snf.stanford.edu Wed Jun 25 19:52:24 2008 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 25 Jun 2008 19:52:24 -0700 Subject: Shutdown svgdev SNF 2008-06-25 19:52:24: track malifunction dropped my wafer inside Message-ID: Track malifunctioned and dropped my wafer inside the dev chamber! From gsosa at snf.stanford.edu Thu Jun 26 07:59:37 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 26 Jun 2008 07:59:37 -0700 Subject: Shutdown svgdev SNF 2008-06-25 19:52:24: track malifunction dropped my wafer inside Message-ID: Tested the track in auto with standard process programs. System ran fine with no problems. From gsosa at snf.stanford.edu Fri Jun 27 16:07:31 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Jun 2008 16:07:31 -0700 Subject: Comment svgdev SNF 2008-06-27 16:07:30: Adjusted wafer centering Message-ID: Checked and adjusted carriage rail position and adjusted wafer centering. Tested track operation. All looks good