Problem svgdev SNF 2008-06-25 01:02:07: belts aren't moving well

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jun 25 07:18:26 PDT 2008


cleaned  & removed  resist residues from belts ( belts are moving normal now )  , hotplates,and pulleys , adjusted air flow to one of the wafer sensors on the hotplate station cycled 
wafers ( 10 each ) checked canister, (canister was full to the
 top ) , Ok to use. 




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