From chughes at snf.stanford.edu Sun Mar 2 16:16:29 2008 From: chughes at snf.stanford.edu (chughes at snf.stanford.edu) Date: Sun, 2 Mar 2008 16:16:29 -0800 Subject: Problem svgdev SNF 2008-03-02 16:16:29: Developer Section Motor Message-ID: It seems like the motor for the part of the track that physically carries the wafer from the cassette to the developer isn't running. Everything else still seems to work. From vilanova at snf.stanford.edu Mon Mar 3 06:07:54 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Mar 2008 06:07:54 -0800 Subject: Comment svgdev SNF 2008-01-23 18:20:14: developer does not accept wafers well Message-ID: Developer canister was empty , I refilled it , system back to normal. From vilanova at snf.stanford.edu Mon Mar 3 06:08:03 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Mar 2008 06:08:03 -0800 Subject: Problem svgdev SNF 2008-03-02 16:16:29: Developer Section Motor Message-ID: Developer canister was empty , I refilled it , system back to normal. From gsosa at snf.stanford.edu Mon Mar 3 10:01:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Mar 2008 10:01:18 -0800 Subject: Shutdown svgdev SNF 2008-03-03 10:01:18: replumbing the CDA supply Message-ID: From gsosa at snf.stanford.edu Mon Mar 3 11:14:09 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Mar 2008 11:14:09 -0800 Subject: Shutdown svgdev SNF 2008-03-03 10:01:18: replumbing the CDA supply Message-ID: Need to gather more parts. will work on at a later time. From gsosa at snf.stanford.edu Thu Mar 13 10:19:43 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Mar 2008 10:19:43 -0700 Subject: Shutdown svgdev SNF 2008-03-13 10:19:40: Wafer off center Message-ID: Adjusting wafer centering From gsosa at snf.stanford.edu Thu Mar 13 11:16:41 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Mar 2008 11:16:41 -0700 Subject: Shutdown svgdev SNF 2008-03-13 10:19:40: Wafer off center Message-ID: Checked and adjusted warfer centering. From jprovine at snf.stanford.edu Mon Mar 17 10:38:55 2008 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 17 Mar 2008 10:38:55 -0700 Subject: Comment svgdev SNF 2008-03-17 10:38:54: spin chuck imbalance? Message-ID: during the high speed spin at the end of development, the motor and spin chuck are loud and sound out of balance. development ran fine, but the machine may have parts grinding or wearing on each other. From rcordova at snf.stanford.edu Tue Mar 18 12:45:09 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 18 Mar 2008 12:45:09 -0700 Subject: Problem svgdev SNF 2008-03-18 12:45:09: High speed is very loud. Possible probleme Message-ID: I informed G Sosa From gsosa at snf.stanford.edu Tue Mar 18 13:15:50 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 18 Mar 2008 13:15:50 -0700 Subject: Shutdown svgdev SNF 2008-03-18 13:15:49: Replacing spindle Message-ID: High speed spindle noise. Replacing spindle From gsosa at snf.stanford.edu Tue Mar 18 14:37:27 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 18 Mar 2008 14:37:27 -0700 Subject: Shutdown svgdev SNF 2008-03-18 13:15:49: Replacing spindle Message-ID: Replaced the spindle. Did spindle calibration. Tested track operation. all OK. From gsosa at snf.stanford.edu Tue Mar 18 14:37:36 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 18 Mar 2008 14:37:36 -0700 Subject: Problem svgdev SNF 2008-03-18 12:45:09: High speed is very loud. Possible probleme Message-ID: Replaced the spindle. Did spindle calibration. Tested track operation. all OK. From king at snf.stanford.edu Tue Mar 18 23:28:09 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 18 Mar 2008 23:28:09 -0700 Subject: Problem svgdev SNF 2008-03-18 23:28:08: spin speed Message-ID: The back track didn't want to spin at the low speeds set in program 3. It should normally spin slowly while developer is applied. From vilanova at snf.stanford.edu Wed Mar 19 07:34:10 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 19 Mar 2008 07:34:10 -0700 Subject: Problem svgdev SNF 2008-03-18 23:28:08: spin speed Message-ID: I ran a wafer on both track to compare them and both of them are working exactly the same, the only problem I found on the back track ( Developer 1 ) is that someone changed the speed and time to a Couple of events. From vilanova at snf.stanford.edu Wed Mar 19 07:34:45 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 19 Mar 2008 07:34:45 -0700 Subject: Comment svgdev SNF 2008-03-17 10:38:54: spin chuck imbalance? Message-ID: the spindle was replaced yesterday and calibrated. From king at snf.stanford.edu Wed Mar 19 23:30:05 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 19 Mar 2008 23:30:05 -0700 Subject: Problem svgdev SNF 2008-03-19 23:30:04: Spin speed Message-ID: The chuck is getting hung up at low speeds again. I switched to the front track which ran OK. From gsosa at snf.stanford.edu Thu Mar 20 07:15:09 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Mar 2008 07:15:09 -0700 Subject: Problem svgdev SNF 2008-03-19 23:30:04: Spin speed Message-ID: Re-calibrated the spindle. Tested track at low speed. Looks good. Tested with program #2- also looks good. From chughes at snf.stanford.edu Sun Mar 23 14:44:11 2008 From: chughes at snf.stanford.edu (chughes at snf.stanford.edu) Date: Sun, 23 Mar 2008 14:44:11 -0700 Subject: Problem svgdev SNF 2008-03-23 14:44:11: Development program #2 Message-ID: The last step of the development program isn't what is listed in the laminated recipe list; it mentions a strange link to program #3. It should be fine for other programs. From vilanova at snf.stanford.edu Mon Mar 24 07:37:28 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Mar 2008 07:37:28 -0700 Subject: Problem svgdev SNF 2008-03-23 14:44:11: Development program #2 Message-ID: Someone change a few Events , time & speed and linked some of the progrmas ( 2, 3, 4, ) I changed them back to their normal settings on the Programs sheet. , tested them and they look Good. Ok to use.