Shutdown svgdev SNF 2009-12-10 08:45:22: defective spindle motor.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Dec 11 08:54:39 PST 2009


replaced motor and calibrated cleaned spindle and catch cup, adjusted spindle Sensor flags, Adjusted hotplate Sensor flags and lubricated
Hotplate lead screw , Calibrated hotplate, Cycled wafers, Ok to use. 




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