From gsosa at snf.stanford.edu Fri Jun 19 08:46:31 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Jun 2009 08:46:31 -0700 Subject: Shutdown svgdev SNF 2009-06-19 08:46:30: Reprogramming Message-ID: Entering in programs for LDD26W Developer. From gsosa at snf.stanford.edu Fri Jun 19 09:47:23 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Jun 2009 09:47:23 -0700 Subject: Shutdown svgdev SNF 2009-06-19 08:46:30: Reprogramming Message-ID: Completed programming changes as per program sheets. Develop programs 3, 4, 6 and 7 develop puddle times changed and dispense changed to LDD26W developer. These programs are used for Shipley 3612 1 micron, 1.6 micron, 3 micron and 7 micron resist processing. Programs 2 and 5 are the same . They use the MF26A developer for I-line processing with the Shipley 955-7 photo-resist. Please continue to use the programming guide to verify programs. From gsosa at snf.stanford.edu Fri Jun 19 09:48:34 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Jun 2009 09:48:34 -0700 Subject: Comment svgdev SNF 2009-06-19 09:48:33: Developer Update 6/19 Message-ID: Completed programming changes as per program sheets. Develop programs 3, 4, 6 and 7 develop puddle times changed and dispense changed to LDD26W developer. These programs are used for Shipley 3612 1 micron, 1.6 micron, 3 micron and 7 micron resist processing. Programs 2 and 5 are the same . They use the MF26A developer for I-line processing with the Shipley 955-7 photo-resist. Please continue to use the programming guide to verify programs. From gth at snf.stanford.edu Tue Jun 30 18:06:36 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 30 Jun 2009 18:06:36 -0700 Subject: Problem svgdev SNF 2009-06-30 18:06:35: developer track not working. Message-ID: hot plate works. something not right.