From mahnaz at snf.stanford.edu Tue Mar 3 15:45:06 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 3 Mar 2009 15:45:06 -0800 Subject: Comment svgdev SNF 2009-03-03 15:45:06: new recipe Message-ID: I do not know but i am getting so many complains with the development since we lost the control of humidity in the litho area. Any how, I have created program #8 on both tracks with 2X 30 seconds of development for now. Please, if you need to make any adjustment use this program #8 to change the time if needed. I Left a note on the track and will update the procedures tomorrow morning. From mahnaz at snf.stanford.edu Mon Mar 30 16:15:50 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 30 Mar 2009 16:15:50 -0700 Subject: Problem svgdev SNF 2009-03-30 16:15:50: Residue on the back of wafers Message-ID: wafers came out with developer residue and some scratches on the back. From vilanova at snf.stanford.edu Tue Mar 31 07:44:34 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 Mar 2009 07:44:34 -0700 Subject: Problem svgdev SNF 2009-03-30 16:15:50: Residue on the back of wafers Message-ID: Cleaned Hotplate belts, chuck , Adjusted bottom dispense Nozzle Cycled wafers, Ready to use, Back of wafers nice and clean!