Problem svgdev SNF 2009-03-30 16:15:50: Residue on the back of wafers

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Mar 31 07:44:34 PDT 2009


Cleaned Hotplate belts, chuck , Adjusted bottom dispense Nozzle
Cycled wafers, Ready to use, Back of wafers nice and clean! 




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