From elvislin at snf.stanford.edu Tue May 5 12:30:16 2009 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Tue, 5 May 2009 12:30:16 -0700 Subject: Shutdown svgdev SNF 2009-05-05 12:30:15: vacuum chuck won't spin Message-ID: From vilanova at snf.stanford.edu Tue May 5 14:54:46 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 5 May 2009 14:54:46 -0700 Subject: Shutdown svgdev SNF 2009-05-05 14:54:45: Water All Over System Message-ID: I Found a lot of water all over the system , The Bard that moves the rails and the Belts got wet , I already called the vendor to get An Spare OneJust in case the old one doesnt want to work I cleaned it and re starterted NOticed A lot of noise On the bearings , I will have to let it dry Until tomorrow. Also The MIcroscope Next to the developer track ( Scope # 4 ) has a problem with the power supply and the MIcroscope ( scope # 3 ) Next to it is missing the wafer plate so if someone has borrow it please bring it back We need it. From vilanova at snf.stanford.edu Wed May 6 15:12:45 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 May 2009 15:12:45 -0700 Subject: Shutdown svgdev SNF 2009-05-05 12:30:15: vacuum chuck won't spin Message-ID: Cleaned Entire System ,( PCB Board ) Replaced Damaged Motor ( water & Developer FOund Inside of it ) Replaced SPindle and calibrated ( spindle and Hotplate ) Cycled wafers, Backside Nice and clean , Ok to use From vilanova at snf.stanford.edu Wed May 6 15:13:01 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 May 2009 15:13:01 -0700 Subject: Shutdown svgdev SNF 2009-05-05 14:54:45: Water All Over System Message-ID: Cleaned Entire System ,( PCB Board ) Replaced Damaged Motor ( water & Developer FOund Inside of it ) Replaced SPindle and calibrated ( spindle and Hotplate ) Cycled wafers, Backside Nice and clean , Ok to use From vilanova at snf.stanford.edu Thu May 7 10:18:29 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 May 2009 10:18:29 -0700 Subject: Problem svgdev SNF 2009-05-06 16:16:33: rubber band at develop station not working Message-ID: Reseted MOtherBoard, NOticed a Bunch of Programs Link to each other , Check your programs before running wafers, I dont Know why Some Users keep Doing it, Cycled wafers, Ok to use. From mahnaz at snf.stanford.edu Tue May 12 11:13:03 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 12 May 2009 11:13:03 -0700 Subject: Problem svgdev SNF 2009-05-12 11:13:03: belt mark on the back Message-ID: Ran asml quals wafers and two wafers came out with many belt marks on the back of wafers. From bchui at snf.stanford.edu Tue May 12 19:39:15 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 12 May 2009 19:39:15 -0700 Subject: Shutdown svgdev SNF 2009-05-12 19:39:14: chuck does not spin Message-ID: leaving a puddle of developer on the wafer at the end of the cycle From vilanova at snf.stanford.edu Wed May 13 09:07:58 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 May 2009 09:07:58 -0700 Subject: Shutdown svgdev SNF 2009-05-12 19:39:14: chuck does not spin Message-ID: cleaned belts hotplates and catch cup , recalibrated Spindle, Cycled wafers , Ok to use.- From vilanova at snf.stanford.edu Wed May 13 09:08:03 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 May 2009 09:08:03 -0700 Subject: Problem svgdev SNF 2009-05-12 11:13:03: belt mark on the back Message-ID: cleaned belts hotplates and catch cup , recalibrated Spindle, Cycled wafers , Ok to use.- From ginel at snf.stanford.edu Fri May 22 16:46:09 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Fri, 22 May 2009 16:46:09 -0700 Subject: Problem svgdev SNF 2009-05-22 16:46:08: scratched wafer! Message-ID: puts a large scratch on the back of my double-polished wafers... two days in a row after light cleaning of track. From vilanova at snf.stanford.edu Tue May 26 07:47:47 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 May 2009 07:47:47 -0700 Subject: Problem svgdev SNF 2009-05-22 16:46:08: scratched wafer! Message-ID: cleaned chuck belts and hotplate, Adjusted EBR Bottom Nozzle, Cycled wafers , Wafers Bottom Looks Clean , ok to use.