From ywidjaja at snf.stanford.edu Sat Oct 17 22:48:45 2009 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sat, 17 Oct 2009 22:48:45 -0700 Subject: Problem svgdev SNF 2009-10-17 22:48:45: Developer solution not rinsed off Message-ID: Developer solution remains on wafer as it's transferred to the hot plate. Was running program #5. From jwpchen at snf.stanford.edu Sun Oct 18 00:36:05 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sun, 18 Oct 2009 00:36:05 -0700 Subject: Comment svgdev SNF 2009-10-18 00:36:04: re: previous problem Message-ID: spindle wasn't spinning at all... From vilanova at snf.stanford.edu Mon Oct 19 08:03:25 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Oct 2009 08:03:25 -0700 Subject: Shutdown svgdev SNF 2009-10-19 08:03:24: Under maintenance + repair Message-ID: Under maintenance + repair From vilanova at snf.stanford.edu Mon Oct 19 11:19:39 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Oct 2009 11:19:39 -0700 Subject: Shutdown svgdev SNF 2009-10-19 08:03:24: Under maintenance + repair Message-ID: replaced Motorand calibbrated, , cleaned spindle catch cup belts hoyplate,Replaced Metal cover for spindle motor and replaced coupling, Cycled wafers Good to use. From vilanova at snf.stanford.edu Mon Oct 19 11:19:45 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Oct 2009 11:19:45 -0700 Subject: Problem svgdev SNF 2009-10-17 22:48:45: Developer solution not rinsed off Message-ID: replaced Motorand calibbrated, , cleaned spindle catch cup belts hoyplate,Replaced Metal cover for spindle motor and replaced coupling, Cycled wafers Good to use. From vilanova at snf.stanford.edu Mon Oct 19 11:19:50 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Oct 2009 11:19:50 -0700 Subject: Comment svgdev SNF 2009-10-18 00:36:04: re: previous problem Message-ID: replaced Motorand calibbrated, , cleaned spindle catch cup belts hoyplate,Replaced Metal cover for spindle motor and replaced coupling, Cycled wafers Good to use.