From jwpchen at snf.stanford.edu Wed Aug 11 18:42:42 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Wed, 11 Aug 2010 18:42:42 -0700 Subject: Comment svgdev SNF 2010-08-11 18:42:42: wafers misaligned on chuck Message-ID: as far as i can tell, the wafers make good contact with the alignment blocks, but end up off-center on the chuck by about 5mm From gsosa at snf.stanford.edu Wed Aug 25 16:57:03 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Aug 2010 16:57:03 -0700 Subject: Problem svgdev SNF 2010-08-25 16:57:02: Sequence Problem 8/25 Message-ID: There is an unusual sequencing problem when running the track in auto mode with no bake after develop( Bake program 9) After the 1st wafer, the next wafer is stranded at the developer(reporting a chuck vacuum error) . If using a bake after develop there is no problem and wafers process fine. I have put in a workaround for now until we can figure out the problem and allows useres to use this track for develop with no bake. The workaround is a 1.0 second delay in bake program 9, step 1. It is actually an end operation with a 1.0 second time. "NO BAKING WILL TAKE PLACE " but the delay will satisfy the glitch in the logic. Please donot change bake program 9. We will continue to troubleshoot the problem, but this will allow us to utilize the track with full capability. From vilanova at snf.stanford.edu Thu Aug 26 09:23:14 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 26 Aug 2010 09:23:14 -0700 Subject: Shutdown svgdev SNF 2010-08-26 09:23:13: Under maintenance....... Message-ID: Found One of the sensor board connector broken. From gsosa at snf.stanford.edu Thu Aug 26 17:29:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 26 Aug 2010 17:29:41 -0700 Subject: Shutdown svgdev SNF 2010-08-26 09:23:13: Under maintenance....... Message-ID: Wafers not loading into developer module. Found poor connection on carriage rail PC board. Replaced a bad pin. Carriage rail sensors working properly now. Next problem- Spindle not at top error. Troubleshoot and found bad sensor for spindle at top position. Replaced the spindle position wire harness and sensors. Re-assemble the developer module and tested. Al functioning normally. Also, the strange sequence problem also went away, so I removed the 1 second delay in bake 9 program. Tested track develop with and without a post bake. Everything working fine. OK to use the developer track. From gsosa at snf.stanford.edu Thu Aug 26 17:29:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 26 Aug 2010 17:29:52 -0700 Subject: Problem svgdev SNF 2010-08-25 16:57:02: Sequence Problem 8/25 Message-ID: Wafers not loading into developer module. Found poor connection on carriage rail PC board. Replaced a bad pin. Carriage rail sensors working properly now. Next problem- Spindle not at top error. Troubleshoot and found bad sensor for spindle at top position. Replaced the spindle position wire harness and sensors. Re-assemble the developer module and tested. Al functioning normally. Also, the strange sequence problem also went away, so I removed the 1 second delay in bake 9 program. Tested track develop with and without a post bake. Everything working fine. OK to use the developer track. From xuanwu at snf.stanford.edu Tue Aug 31 01:16:01 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Tue, 31 Aug 2010 01:16:01 -0700 Subject: Comment svgdev SNF 2010-08-31 01:15:59: Receiver Cassette Miscalibration Message-ID: The indexer skips the fifth slot on the receiver cassette (I ran 8 wafers), so I'm guessing there's a 25% error (4 wafers use 5 slots), so if you have more than 20 wafers, I'd split them into two batches.