From vilanova at snf.stanford.edu Thu Jul 8 08:41:01 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Jul 2010 08:41:01 -0700 Subject: Comment svgdev SNF 2010-07-08 08:41:00: Replaced defective sensor board. Message-ID: While Inspecting the developer tracks , We found the sensor board defective checked and cleaned sensor wires and replaced broken sensor board , tested Good to use. From egarnett at snf.stanford.edu Tue Jul 13 13:58:20 2010 From: egarnett at snf.stanford.edu (egarnett at snf.stanford.edu) Date: Tue, 13 Jul 2010 13:58:20 -0700 Subject: Problem svgdev SNF 2010-07-13 13:58:19: residue on chuck and bumpy transfer Message-ID: There seems to be something on the spinner chuck that is leaving a residue on the back of wafers. Also, after the spinning the wafer does not properly transfer to the next station and has to be manually moved. These problems might be related. From gsosa at snf.stanford.edu Tue Jul 13 16:46:44 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 13 Jul 2010 16:46:44 -0700 Subject: Problem svgdev SNF 2010-07-13 13:58:19: residue on chuck and bumpy transfer Message-ID: Cleaned chuck and adjusted BSR. Checked and repaired wiring to sensor PCB and adjusted wafer load timing.