From mmessana at snf.stanford.edu Thu Mar 4 22:05:52 2010 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Thu, 4 Mar 2010 22:05:52 -0800 Subject: Problem svgdev SNF 2010-03-04 22:05:51: wafers not dropping onto hotplate correctly Message-ID: From vilanova at snf.stanford.edu Fri Mar 5 08:05:33 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2010 08:05:33 -0800 Subject: Problem svgdev SNF 2010-03-04 22:05:51: wafers not dropping onto hotplate correctly Message-ID: Adjusted Wafer Speed In, and cycled wafers, Wafer are now landing right on the hotplate center, ok to use. From damodei at snf.stanford.edu Tue Mar 9 03:09:59 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Tue, 9 Mar 2010 03:09:59 -0800 Subject: Problem svgdev SNF 2010-03-09 03:09:59: Message-ID: Developer nozzle is leaky, drips developer onto wafers as they are leaving and is ruining my wafers. From vilanova at snf.stanford.edu Tue Mar 9 08:39:44 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Mar 2010 08:39:44 -0800 Subject: Problem svgdev SNF 2010-03-09 03:09:59: Message-ID: Adjusted sparay Developer nozzles and cycled wafers, NO residues of developer on the wafers, ok to use. From ofidaner at snf.stanford.edu Tue Mar 23 07:18:43 2010 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Tue, 23 Mar 2010 07:18:43 -0700 Subject: Problem svgdev SNF 2010-03-23 07:18:42: receiver elevator does not work Message-ID: the developer can be used in manual mode From vilanova at snf.stanford.edu Tue Mar 23 08:25:41 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 23 Mar 2010 08:25:41 -0700 Subject: Shutdown svgdev SNF 2010-03-23 08:25:41: Receiver indexer motor down .......... Message-ID: working on Receiver Indexer ............................................ From vilanova at snf.stanford.edu Tue Mar 23 11:27:42 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 23 Mar 2010 11:27:42 -0700 Subject: Shutdown svgdev SNF 2010-03-23 08:25:41: Receiver indexer motor down .......... Message-ID: Replaced Receiver Indexer Motor , Cleaned Hotplate ALso I Adjusted the metal cassette that was dancing de cha cha :-) Tested ok ready to use. From vilanova at snf.stanford.edu Tue Mar 23 11:28:36 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 23 Mar 2010 11:28:36 -0700 Subject: Problem svgdev SNF 2010-03-23 07:18:42: receiver elevator does not work Message-ID: Replaced Receiver Indexer Motor , Cleaned Hotplate ALso I Adjusted the metal cassette that was dancing de cha cha :-) Tested ok ready to use. From damodei at snf.stanford.edu Thu Mar 25 00:08:05 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Thu, 25 Mar 2010 00:08:05 -0700 Subject: Problem svgdev SNF 2010-03-25 00:08:04: Something wrong with sensors Message-ID: System does not seem to move wafers from sender casette, does not sense wafers on develop chuck, tried restarting it to no effect. Seems like soemthing wrong with wafers sensors From gsosa at snf.stanford.edu Thu Mar 25 08:27:07 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 25 Mar 2010 08:27:07 -0700 Subject: Problem svgdev SNF 2010-03-25 00:08:04: Something wrong with sensors Message-ID: Cheched system. Reciever not indexing up after recieving wafers. Adjusted/increased air for reciever air sensor. Tested system with standard program. All OK. From jasonlin at snf.stanford.edu Thu Mar 25 15:58:57 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Thu, 25 Mar 2010 15:58:57 -0700 Subject: Problem svgdev SNF 2010-03-25 15:58:57: Wafer getting stuck on sender casette Message-ID: From karthikv at snf.stanford.edu Thu Mar 25 19:01:33 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 25 Mar 2010 19:01:33 -0700 Subject: Problem svgdev SNF 2010-03-25 19:01:32: Sender not working Message-ID: Confirming problem reported by jasolin From jwpchen at snf.stanford.edu Thu Mar 25 22:27:55 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 25 Mar 2010 22:27:55 -0700 Subject: Comment svgdev SNF 2010-03-25 22:27:54: works fine Message-ID: maybe somebody fixed the machine in the meantime, but now it appears to be working normally From vilanova at snf.stanford.edu Fri Mar 26 07:51:20 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:51:20 -0700 Subject: Problem svgdev SNF 2010-03-25 15:58:57: Wafer getting stuck on sender casette Message-ID: Found A couple of metal cassettes Out of adjustment, Sometiles if the cassette does not sit properly on the indexer the sensor will not work, I fixed the cassettes and tested them , cycled wafers everything Ok now, ok to use. From vilanova at snf.stanford.edu Fri Mar 26 07:51:33 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:51:33 -0700 Subject: Problem svgdev SNF 2010-03-25 19:01:32: Sender not working Message-ID: Found A couple of metal cassettes Out of adjustment, Sometiles if the cassette does not sit properly on the indexer the sensor will not work, I fixed the cassettes and tested them , cycled wafers everything Ok now, ok to use. From vilanova at snf.stanford.edu Fri Mar 26 07:51:41 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 26 Mar 2010 07:51:41 -0700 Subject: Comment svgdev SNF 2010-03-25 22:27:54: works fine Message-ID: Found A couple of metal cassettes Out of adjustment, Sometiles if the cassette does not sit properly on the indexer the sensor will not work, I fixed the cassettes and tested them , cycled wafers everything Ok now, ok to use. From rshyam at snf.stanford.edu Wed Mar 31 00:32:02 2010 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Wed, 31 Mar 2010 00:32:02 -0700 Subject: Problem svgdev SNF 2010-03-31 00:32:01: wafers keep getting stuck at sender station Message-ID: From gsosa at snf.stanford.edu Wed Mar 31 08:51:33 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 08:51:33 -0700 Subject: Shutdown svgdev SNF 2010-03-31 08:51:33: not sending wafers Message-ID: From gsosa at snf.stanford.edu Wed Mar 31 09:22:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 09:22:21 -0700 Subject: Problem svgdev SNF 2010-03-31 00:32:01: wafers keep getting stuck at sender station Message-ID: Replaced connector and repaired broken wire to wafer sensor. Tested operation- OK From gsosa at snf.stanford.edu Wed Mar 31 09:22:27 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 09:22:27 -0700 Subject: Shutdown svgdev SNF 2010-03-31 08:51:33: not sending wafers Message-ID: Replaced connector and repaired broken wire to wafer sensor. Tested operation- OK