From mtan at snf.stanford.edu  Sun May  2 12:32:18 2010
From: mtan at snf.stanford.edu (mtan at snf.stanford.edu)
Date: Sun, 2 May 2010 12:32:18 -0700
Subject: Problem svgdev SNF 2010-05-02 12:32:18: inconsistent lose of vacuum
Message-ID: <mailman.786.1357938757.25901.svgdev-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Mon May  3 08:18:41 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 3 May 2010 08:18:41 -0700
Subject: Problem svgdev SNF 2010-05-02 12:32:18: inconsistent lose of vacuum
Message-ID: <mailman.787.1357938757.25901.svgdev-pcs@snf.stanford.edu>

Unable to reproduce problem. Cycled 30 wafers through the tool woth no errors. All handling functions working normally. Tested chuck vacuum- OK.