From calarrudo at snf.stanford.edu Tue Oct 26 16:56:55 2010 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 26 Oct 2010 16:56:55 -0700 Subject: Shutdown svgdev SNF 2010-10-26 16:56:53: Message-ID: wafers feeding on track 1 using program 3-1. I had to pull wafers off the develop chuck which was under vacumm. From gsosa at snf.stanford.edu Wed Oct 27 08:51:46 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 27 Oct 2010 08:51:46 -0700 Subject: Comment svgdev SNF 2010-10-27 08:51:46: Motor replacement Message-ID: Need to replace spindle motor. From gsosa at snf.stanford.edu Wed Oct 27 15:34:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 27 Oct 2010 15:34:17 -0700 Subject: Shutdown svgdev SNF 2010-10-26 16:56:53: Message-ID: Troubleshot and found broken motor coupling between motor and spindle assembly. Replaced coupling. Performed spindle calibration- OK to 9KRPM. Tested track with 20 + wafers using standard program (Dev 3 and Bake 1). All OK Checked backside for wetting. Adjusted B/S rinse nozzle and cleaned chuck. System OK to use. From gsosa at snf.stanford.edu Wed Oct 27 15:34:24 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 27 Oct 2010 15:34:24 -0700 Subject: Comment svgdev SNF 2010-10-27 08:51:46: Motor replacement Message-ID: Troubleshot and found broken motor coupling between motor and spindle assembly. Replaced coupling. Performed spindle calibration- OK to 9KRPM. Tested track with 20 + wafers using standard program (Dev 3 and Bake 1). All OK Checked backside for wetting. Adjusted B/S rinse nozzle and cleaned chuck. System OK to use.