From cursive at snf.stanford.edu Thu Apr 7 19:47:36 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 7 Apr 2011 19:47:36 -0700 Subject: Problem svgdev SNF 2011-04-07 19:47:35: sensor of receiving cassette can't work well Message-ID: Need to push the wafer manually From jparker at snf.stanford.edu Fri Apr 8 07:28:55 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 8 Apr 2011 07:28:55 -0700 Subject: Comment svgdev SNF 2011-04-08 07:28:54: To 4/7 cursive problem Message-ID: Receiving cassette worked fine for 14 wafers run in 5 separate batches. Receiving cassette lowered, accepted wafers, and raised upon reset for all of them. From vilanova at snf.stanford.edu Fri Apr 8 07:45:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Apr 2011 07:45:44 -0700 Subject: Problem svgdev SNF 2011-04-07 19:47:35: sensor of receiving cassette can't work well Message-ID: Receiving Cassette and sendr working Fine, ran and cycled wafers System working Fine, Thanks Jason!! From grahamab at snf.stanford.edu Sun Apr 10 18:38:33 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 10 Apr 2011 18:38:33 -0700 Subject: Problem svgdev SNF 2011-04-10 18:38:33: receiver station missing one belt Message-ID: missing one of the belts that grabs the wafer into the receiver cassette. a lot of wafers aren't making it in, causing the track to alarm. nudging it works fine, but requires constant supervision. From vilanova at snf.stanford.edu Mon Apr 11 08:04:08 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Apr 2011 08:04:08 -0700 Subject: Problem svgdev SNF 2011-04-10 18:38:33: receiver station missing one belt Message-ID: Belt Back On, ( It was just out of the rail, ) Put it back on and cycled wafers, Good to use. From sclaussen at snf.stanford.edu Wed Apr 13 17:38:55 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Wed, 13 Apr 2011 17:38:55 -0700 Subject: Shutdown svgdev SNF 2011-04-13 17:38:54: shattered wafer Message-ID: While depositing developer, the chuck lost vacuum and dropped my wafer, shutting off power. The wafer was stuck below the chuck, and when we tried turning the power back on, the wafer shattered. Wafer pieces are everywhere. From vilanova at snf.stanford.edu Thu Apr 14 08:45:17 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Apr 2011 08:45:17 -0700 Subject: Shutdown svgdev SNF 2011-04-13 17:38:54: shattered wafer Message-ID: Removed Wafer Broken Pieces and cleaned Catch cup, cycled wafers system good to use. note : IF THE WAFER GETS STUCK ON THE CHUCK AND UNDER VACUUM AND IF POWER IS TURNED OFF... REMOVED THE WAFER FIRST ( WAFER IS NOT UNDER VACUUM AT THIS POINT ) AND THEN POWER SYSTEM BACK ON.