From ylyang at snf.stanford.edu  Tue Aug  2 22:17:42 2011
From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu)
Date: Tue, 2 Aug 2011 22:17:42 -0700
Subject: Problem svgdev SNF 2011-08-02 22:17:41: backside is wet
Message-ID: <mailman.858.1357938758.25901.svgdev-pcs@snf.stanford.edu>

after the develop without bake, the backside of the wafer is wet.



From vilanova at snf.stanford.edu  Wed Aug  3 08:17:26 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 3 Aug 2011 08:17:26 -0700
Subject: Problem svgdev SNF 2011-08-02 22:17:41: backside is wet
Message-ID: <mailman.859.1357938758.25901.svgdev-pcs@snf.stanford.edu>

cleaned catch cup chuck and belts, adjusted Backside Rinse Nozzle,
Cycled wafers, Back Of wafers Clean , ok to use. 



From jparker at snf.stanford.edu  Mon Aug 29 10:35:03 2011
From: jparker at snf.stanford.edu (jparker at snf.stanford.edu)
Date: Mon, 29 Aug 2011 10:35:03 -0700
Subject: Problem svgdev SNF 2011-08-29 10:35:03: Send index belt motionless
Message-ID: <mailman.860.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Send indexer drops and stops at wafer appropriately, but belt never starts. Prog 5/1.



From vilanova at snf.stanford.edu  Mon Aug 29 11:00:44 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 29 Aug 2011 11:00:44 -0700
Subject: Problem svgdev SNF 2011-08-29 10:35:03: Send index belt motionless
Message-ID: <mailman.861.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Power Cycle system and Ran Wafers, Ok to use. 



From vilanova at snf.stanford.edu  Tue Aug 30 10:08:07 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 30 Aug 2011 10:08:07 -0700
Subject: Shutdown svgdev SNF 2011-08-30 10:08:06: Under maintenance....
Message-ID: <mailman.862.1357938758.25901.svgdev-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Aug 30 14:57:26 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 30 Aug 2011 14:57:26 -0700
Subject: Shutdown svgdev SNF 2011-08-30 10:08:06: Under maintenance....
Message-ID: <mailman.863.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Maintenance Repairs and adjustments completed.  



From sclaussen at snf.stanford.edu  Wed Aug 31 21:38:21 2011
From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu)
Date: Wed, 31 Aug 2011 21:38:21 -0700
Subject: Problem svgdev SNF 2011-08-31 21:38:20: Error about sender not being straight and upstream problem...
Message-ID: <mailman.864.1357938758.25901.svgdev-pcs@snf.stanford.edu>