From xuanwu at snf.stanford.edu  Sat Jan  8 17:31:25 2011
From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu)
Date: Sat, 8 Jan 2011 17:31:25 -0800
Subject: Problem svgdev SNF 2011-01-08 17:31:25: send index problem
Message-ID: <mailman.821.1357938758.25901.svgdev-pcs@snf.stanford.edu>

the indexer doesn't seem to feel the pressure of the wafer on the bands, so the cassette presses down on the wafer into the track, and the wafer gets jammed.



From gsosa at snf.stanford.edu  Mon Jan 10 09:36:01 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 10 Jan 2011 09:36:01 -0800
Subject: Shutdown svgdev SNF 2011-01-10 09:36:00: Wafer handling problem
Message-ID: <mailman.822.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Working on wafer handling problem



From gsosa at snf.stanford.edu  Tue Jan 11 08:44:29 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 11 Jan 2011 08:44:29 -0800
Subject: Shutdown svgdev SNF 2011-01-10 09:36:00: Wafer handling problem
Message-ID: <mailman.823.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Carriage rail sensors not working. Replaced wire harness for the wafer sensors and tested track operation with standard program. Track functioning normally.



From gsosa at snf.stanford.edu  Tue Jan 11 08:44:36 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 11 Jan 2011 08:44:36 -0800
Subject: Problem svgdev SNF 2011-01-08 17:31:25: send index problem
Message-ID: <mailman.824.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Carriage rail sensors not working. Replaced wire harness for the wafer sensors and tested track operation with standard program. Track functioning normally.



From jsegal at snf.stanford.edu  Thu Jan 13 15:19:45 2011
From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu)
Date: Thu, 13 Jan 2011 15:19:45 -0800
Subject: Shutdown svgdev SNF 2011-01-13 15:19:43: broken wafer in developer
Message-ID: <mailman.825.1357938758.25901.svgdev-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Thu Jan 13 16:05:46 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 13 Jan 2011 16:05:46 -0800
Subject: Shutdown svgdev SNF 2011-01-13 15:19:43: broken wafer in developer
Message-ID: <mailman.826.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Cleaned up broken wafer in cup. Tested wafer transfer with several wafers- OK. Ckecked wafer centering- OK. Checked Chuck vacuum- OK at 23".