From gsosa at snf.stanford.edu  Fri Jul  8 09:21:33 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 8 Jul 2011 09:21:33 -0700
Subject: Comment svgdev SNF 2011-07-08 09:21:32: Cleaned 7/8
Message-ID: <mailman.855.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Checked developer for backside wetting. Looks OK. Cleaned the belts and chuck. Operational test OK.



From kvntien at snf.stanford.edu  Wed Jul 13 12:12:54 2011
From: kvntien at snf.stanford.edu (kvntien at snf.stanford.edu)
Date: Wed, 13 Jul 2011 12:12:54 -0700
Subject: Problem svgdev SNF 2011-07-13 12:12:54: wafer sitting way off center
Message-ID: <mailman.856.1357938758.25901.svgdev-pcs@snf.stanford.edu>

wafer was loaded with the outer 1/3 of the wafer on the center of the chuck, spin cycle resulted in loud noises. wafer backside has sticky residue from chuck



From vilanova at snf.stanford.edu  Wed Jul 13 13:30:59 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 13 Jul 2011 13:30:59 -0700
Subject: Problem svgdev SNF 2011-07-13 12:12:54: wafer sitting way off center
Message-ID: <mailman.857.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Checked Program # 7 Steps ,
Cleaned Chuck , Removed Excess Photoresist From hotplate,
Cycled  Wafers Using Program # 7, Wafer Centering is Fine, 
Back of wafers are clean , System Ok to use