From mahnaz at snf.stanford.edu  Thu Jun  2 15:50:13 2011
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 2 Jun 2011 15:50:13 -0700
Subject: Problem svgdev SNF 2011-06-02 15:50:13: wafers sits little off center on hot plate
Message-ID: <mailman.851.1357938758.25901.svgdev-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Fri Jun  3 10:04:55 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 3 Jun 2011 10:04:55 -0700
Subject: Problem svgdev SNF 2011-06-02 15:50:13: wafers sits little off center on hot plate
Message-ID: <mailman.852.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Adjusted belt speed on hotplate transfer carriage. Also adjusted sensor air on send indexer. Tested track operation. All OK.



From gsosa at snf.stanford.edu  Thu Jun 23 16:07:53 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 23 Jun 2011 16:07:53 -0700
Subject: Shutdown svgdev SNF 2011-06-23 16:07:53: Wafer loading problem
Message-ID: <mailman.853.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Problem with wafers loading to developer module. Need to troubleshoot and repair.



From gsosa at snf.stanford.edu  Fri Jun 24 13:37:50 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 24 Jun 2011 13:37:50 -0700
Subject: Shutdown svgdev SNF 2011-06-23 16:07:53: Wafer loading problem
Message-ID: <mailman.854.1357938758.25901.svgdev-pcs@snf.stanford.edu>

1st problem- Unable to control spin speed.. Troubleshot and found bad encoder sensor on spindle assembly. Replaced bottom half af spindle assembly and the spindle wire harness. Spindle speed control OK now and calibrates up to >9KRPM's. 2nd problem- Carriage in and out sensors not sensing. Found and repaired broken wire in carriage wire harness. All sensors on developer carriage working properly. Tested developer operation with standard programs- All tested OK.