Shutdown svgdev SNF 2011-06-23 16:07:53: Wafer loading problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jun 24 13:37:50 PDT 2011


1st problem- Unable to control spin speed.. Troubleshot and found bad encoder sensor on spindle assembly. Replaced bottom half af spindle assembly and the spindle wire harness. Spindle speed control OK now and calibrates up to >9KRPM's. 2nd problem- Carriage in and out sensors not sensing. Found and repaired broken wire in carriage wire harness. All sensors on developer carriage working properly. Tested developer operation with standard programs- All tested OK.




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