From jsegal at snf.stanford.edu  Tue Mar  1 12:06:21 2011
From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu)
Date: Tue, 1 Mar 2011 12:06:21 -0800
Subject: Shutdown svgdev SNF 2011-03-01 12:06:20: broken wafer in developer
Message-ID: <mailman.827.1357938758.25901.svgdev-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Mar  1 14:51:54 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 1 Mar 2011 14:51:54 -0800
Subject: Shutdown svgdev SNF 2011-03-01 12:06:20: broken wafer in developer
Message-ID: <mailman.828.1357938758.25901.svgdev-pcs@snf.stanford.edu>

removed broken wafers , cleaned catch cup,belts ,chuck, tested wafers
everything fine back of wafers fine, ok to use. 



From gsosa at snf.stanford.edu  Tue Mar  1 15:20:59 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 1 Mar 2011 15:20:59 -0800
Subject: Shutdown svgdev SNF 2011-03-01 15:20:59: Exhaust problem 3/1
Message-ID: <mailman.829.1357938758.25901.svgdev-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Tue Mar  1 17:52:57 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 1 Mar 2011 17:52:57 -0800
Subject: Shutdown svgdev SNF 2011-03-01 15:20:59: Exhaust problem 3/1
Message-ID: <mailman.830.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Re-adjusted exhaust to compensate for reduced exhaust flow. Tested track operation-All OK



From chen0622 at snf.stanford.edu  Fri Mar  4 07:06:49 2011
From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu)
Date: Fri, 4 Mar 2011 07:06:49 -0800
Subject: Problem svgdev SNF 2011-03-04 07:06:49: conveyer not moving
Message-ID: <mailman.831.1357938758.25901.svgdev-pcs@snf.stanford.edu>

After developed, the wafer could not move to hot plate.  The conveyer is not moving.  



From gsosa at snf.stanford.edu  Fri Mar  4 09:53:58 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 4 Mar 2011 09:53:58 -0800
Subject: Problem svgdev SNF 2011-03-04 07:06:49: conveyer not moving
Message-ID: <mailman.832.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Tested track operation. All OK



From vilanova at snf.stanford.edu  Tue Mar  8 14:17:18 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 8 Mar 2011 14:17:18 -0800
Subject: Comment svgdev SNF 2011-03-08 14:17:18: Developer Sprayer  Not functioning 
Message-ID: <mailman.833.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Someone reported to me that the Developer sprayer wasnt dispensing at all,. Removed the nozzle and cleaned it, Installed back and tested,
Ok to use. 



From bchui at snf.stanford.edu  Fri Mar 11 16:56:33 2011
From: bchui at snf.stanford.edu (bchui at snf.stanford.edu)
Date: Fri, 11 Mar 2011 16:56:33 -0800
Subject: Problem svgdev SNF 2011-03-11 16:56:33: Prog 4 messed up
Message-ID: <mailman.834.1357938758.25901.svgdev-pcs@snf.stanford.edu>

someone nulled out step 9 (spin dry)



From vilanova at snf.stanford.edu  Sat Mar 12 10:59:08 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sat, 12 Mar 2011 10:59:08 -0800
Subject: Problem svgdev SNF 2011-03-11 16:56:33: Prog 4 messed up
Message-ID: <mailman.835.1357938758.25901.svgdev-pcs@snf.stanford.edu>

checked program # 4 steps all of them back to normal , tested , ok to
 use.