From vilanova at snf.stanford.edu Thu Sep 1 08:32:29 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Sep 2011 08:32:29 -0700 Subject: Problem svgdev SNF 2011-08-31 21:38:20: Error about sender not being straight and upstream problem... Message-ID: Problem was with the metal cassette not with the developer, If metal cassette doesnt sit properly it will not trigger the sensor therefore the system will show an error., System tested ok good to use. From gsosa at snf.stanford.edu Wed Sep 7 07:13:16 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 7 Sep 2011 07:13:16 -0700 Subject: Shutdown svgdev SNF 2011-09-07 07:13:15: Scheduled Shutdown Message-ID: System Shutdown. Solvent exhaust upgrade in progress. From gsosa at snf.stanford.edu Thu Sep 8 16:49:11 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 Sep 2011 16:49:11 -0700 Subject: Shutdown svgdev SNF 2011-09-08 16:49:10: Wafer transfer problem Message-ID: The wafer are not loading indo developer module. Need to troubleshoot From gsosa at snf.stanford.edu Fri Sep 9 13:32:18 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 9 Sep 2011 13:32:18 -0700 Subject: Shutdown svgdev SNF 2011-09-08 16:49:10: Wafer transfer problem Message-ID: Repaired broken wire at connector on carriage rail sensor PC board. Broken wire was the sensor line from the wafer sensor board to the controller. Tested operation. Adjusted carriage output belt speed. All OK. From gsosa at snf.stanford.edu Fri Sep 9 13:32:23 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 9 Sep 2011 13:32:23 -0700 Subject: Shutdown svgdev SNF 2011-09-07 07:13:15: Scheduled Shutdown Message-ID: Repaired broken wire at connector on carriage rail sensor PC board. Broken wire was the sensor line from the wafer sensor board to the controller. Tested operation. Adjusted carriage output belt speed. All OK. From emazz86 at snf.stanford.edu Wed Sep 14 15:48:19 2011 From: emazz86 at snf.stanford.edu (emazz86 at snf.stanford.edu) Date: Wed, 14 Sep 2011 15:48:19 -0700 Subject: Problem svgdev SNF 2011-09-14 15:48:19: Wafer placement on oven Message-ID: The track did not place any of my wafers in the center of the oven pad. There were all placed in the same spot, a cm or 2 towards the end of the track. From vilanova at snf.stanford.edu Thu Sep 15 08:11:19 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Sep 2011 08:11:19 -0700 Subject: Problem svgdev SNF 2011-09-14 15:48:19: Wafer placement on oven Message-ID: Ive Ran A lot of wafers Using Program # 3 and also using Program Bake Only all of my wafers were centered Correctly, Ran 4 wafers For Program # 3 and 4 for program # 9 , System Ok to use. From vossough at snf.stanford.edu Mon Sep 26 00:44:23 2011 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Mon, 26 Sep 2011 00:44:23 -0700 Subject: Comment svgdev SNF 2011-09-26 00:44:22: Broke wafer Message-ID: broke wafer on developer. From vossough at snf.stanford.edu Mon Sep 26 03:38:20 2011 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Mon, 26 Sep 2011 03:38:20 -0700 Subject: Problem svgdev SNF 2011-09-26 03:38:19: Broken wafer inside developer Message-ID: broke a wafer during develop spin. From vilanova at snf.stanford.edu Mon Sep 26 08:39:11 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Sep 2011 08:39:11 -0700 Subject: Problem svgdev SNF 2011-09-26 03:38:19: Broken wafer inside developer Message-ID: removed broken wafer and cleaned up catch cup, cycled wafers ( 5 each ) tested Ok ready to use.