From gsosa at snf.stanford.edu  Mon Jul  2 10:56:08 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 2 Jul 2012 10:56:08 -0700
Subject: Problem svgdev SNF 2012-06-29 19:15:42: Alarming on dev dispense
Message-ID: <mailman.922.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Cannister level OK. Adjusted pressure to 12 psi. Also replaced all female pins on the track side of the spindle motor harness. Tested OK



From gsosa at snf.stanford.edu  Tue Jul  3 11:22:50 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 3 Jul 2012 11:22:50 -0700
Subject: Shutdown svgdev SNF 2012-07-03 11:22:49: spindle problem
Message-ID: <mailman.923.1357938758.25901.svgdev-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Tue Jul  3 15:49:07 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 3 Jul 2012 15:49:07 -0700
Subject: Shutdown svgdev SNF 2012-07-03 11:22:49: spindle problem
Message-ID: <mailman.924.1357938759.25901.svgdev-pcs@snf.stanford.edu>

Troubleshot and replaced the IO board. Did spindle and B/P calibration. Cycled many wafers with standard program. All OK.