From calarrudo at snf.stanford.edu  Sat Jun  9 16:29:59 2012
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Sat, 9 Jun 2012 16:29:59 -0700
Subject: Shutdown svgdev SNF 2012-06-09 16:29:58: 
Message-ID: <mailman.915.1357938758.25901.svgdev-pcs@snf.stanford.edu>




From calarrudo at snf.stanford.edu  Sat Jun  9 16:32:49 2012
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Sat, 9 Jun 2012 16:32:49 -0700
Subject: Problem svgdev SNF 2012-06-09 16:32:48: svgdev
Message-ID: <mailman.916.1357938758.25901.svgdev-pcs@snf.stanford.edu>

svgdev track 1 poor develop, circles and underdeveloped all over the 
wafers.  I have to rework 8 wafers.



From gsosa at snf.stanford.edu  Mon Jun 11 10:26:58 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 11 Jun 2012 10:26:58 -0700
Subject: Problem svgdev SNF 2012-06-09 16:32:48: svgdev
Message-ID: <mailman.917.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Spindle spinning at max speed. Cleaned up spindle encoder wheel and sensor. Tested track operation. Spining normal as per program.



From gsosa at snf.stanford.edu  Mon Jun 11 10:27:02 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 11 Jun 2012 10:27:02 -0700
Subject: Shutdown svgdev SNF 2012-06-09 16:29:58: 
Message-ID: <mailman.918.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Spindle spinning at max speed. Cleaned up spindle encoder wheel and sensor. Tested track operation. Spining normal as per program.



From hsyoon at snf.stanford.edu  Fri Jun 22 16:18:25 2012
From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu)
Date: Fri, 22 Jun 2012 16:18:25 -0700
Subject: Problem svgdev SNF 2012-06-22 16:18:25: speed out of band
Message-ID: <mailman.919.1357938758.25901.svgdev-pcs@snf.stanford.edu>

keep alarming



From vilanova at snf.stanford.edu  Mon Jun 25 11:21:06 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 25 Jun 2012 11:21:06 -0700
Subject: Problem svgdev SNF 2012-06-22 16:18:25: speed out of band
Message-ID: <mailman.920.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Spindle spinning at max speed. Cleaned up spindle encoder wheel and sensor. Tested track operation. Spining normal as per program.



From jparker at snf.stanford.edu  Fri Jun 29 19:15:43 2012
From: jparker at snf.stanford.edu (jparker at snf.stanford.edu)
Date: Fri, 29 Jun 2012 19:15:43 -0700
Subject: Problem svgdev SNF 2012-06-29 19:15:42: Alarming on dev dispense
Message-ID: <mailman.921.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Alarm during developer dispense. Looks like not enough developer is being dispensed (during the 0 rpm 'dwell/develop' step) as there are voids of developer on the wafer that leave rings of dried chemical. Will update if it's just low on material and I can get it filled.