Problem svgdev SNF 2012-06-29 19:15:42: Alarming on dev dispense

jparker at snf.stanford.edu jparker at snf.stanford.edu
Fri Jun 29 19:15:43 PDT 2012


Alarm during developer dispense. Looks like not enough developer is being dispensed (during the 0 rpm 'dwell/develop' step) as there are voids of developer on the wafer that leave rings of dried chemical. Will update if it's just low on material and I can get it filled.




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