From ylyang at snf.stanford.edu Thu Mar 1 15:52:36 2012 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Thu, 1 Mar 2012 15:52:36 -0800 Subject: Problem svgdev SNF 2012-03-01 15:52:35: wafer stps on the chuck Message-ID: The wafer on dev1 is a duming wafer. From ylyang at snf.stanford.edu Thu Mar 1 15:53:36 2012 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Thu, 1 Mar 2012 15:53:36 -0800 Subject: Shutdown svgdev SNF 2012-03-01 15:53:36: wafer stops on the chuck Message-ID: The wafer is dummy wafer. From mahnaz at snf.stanford.edu Thu Mar 1 16:13:02 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 1 Mar 2012 16:13:02 -0800 Subject: Shutdown svgdev SNF 2012-03-01 15:53:36: wafer stops on the chuck Message-ID: reset the system , running dummies, seems to be okay. From mahnaz at snf.stanford.edu Thu Mar 1 16:13:25 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 1 Mar 2012 16:13:25 -0800 Subject: Problem svgdev SNF 2012-03-01 15:52:35: wafer stps on the chuck Message-ID: noted From cmcg at snf.stanford.edu Wed Mar 7 15:24:55 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 7 Mar 2012 15:24:55 -0800 Subject: Problem svgdev SNF 2012-03-07 15:24:54: leaving a ring towards the center of the wafer Message-ID: After developing there is a strange ring about an inch from the center of the wafer. It is in the resist. Upon watching the develop one of the spray nozzles has 3 or 4 concentrated jets instead of a uniform fan-like spray. From gsosa at snf.stanford.edu Thu Mar 8 14:49:09 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 Mar 2012 14:49:09 -0800 Subject: Problem svgdev SNF 2012-03-07 15:24:54: leaving a ring towards the center of the wafer Message-ID: Replaced the developer spray nozzle. Vhecked and adjusted fan pattern for proper coverage. Tested track operation. All OK From kosarb at snf.stanford.edu Wed Mar 14 13:46:25 2012 From: kosarb at snf.stanford.edu (kosarb at snf.stanford.edu) Date: Wed, 14 Mar 2012 13:46:25 -0700 Subject: Problem svgdev SNF 2012-03-14 13:46:25: dev motor not working Message-ID: wafer stops when it hits the develop track because the motor is not spinning. From vilanova at snf.stanford.edu Wed Mar 14 14:14:12 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Mar 2012 14:14:12 -0700 Subject: Problem svgdev SNF 2012-03-14 13:46:25: dev motor not working Message-ID: One of the Belt transfer Motor Broke , , Soldered it back , tested ok to use