From dongrip at snf.stanford.edu  Tue May  1 21:27:46 2012
From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu)
Date: Tue, 1 May 2012 21:27:46 -0700
Subject: Problem svgdev SNF 2012-05-01 21:27:45: the spiner makes big noise.
Message-ID: <mailman.909.1357938758.25901.svgdev-pcs@snf.stanford.edu>

developing quality is also bad.



From gsosa at snf.stanford.edu  Wed May  2 10:46:22 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 2 May 2012 10:46:22 -0700
Subject: Problem svgdev SNF 2012-05-01 21:27:45: the spiner makes big noise.
Message-ID: <mailman.910.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Spindle runnaway problem. Replaced the spindle guide plate wire harness, which includes a new sensor for spindle control. Repaired a leaking water line on the backside rinse assembly. Calibrated spindle. Tested operation with standard program. All looks good.



From jparker at snf.stanford.edu  Thu May  3 06:30:52 2012
From: jparker at snf.stanford.edu (jparker at snf.stanford.edu)
Date: Thu, 3 May 2012 06:30:52 -0700
Subject: Problem svgdev SNF 2012-05-03 06:30:51: Loud at high speeds
Message-ID: <mailman.911.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Dev station is abnormally loud (it "buzzes" like an overworked motor) at 5k rpm.



From vilanova at snf.stanford.edu  Thu May  3 08:16:51 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 3 May 2012 08:16:51 -0700
Subject: Problem svgdev SNF 2012-05-03 06:30:51: Loud at high speeds
Message-ID: <mailman.912.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Spindle is a bit Louder than Front track ,
Calibrated Spindle and Cycled wafers, All
Operations Ok, Ready to use. 



From kavehm at snf.stanford.edu  Mon May 14 14:15:23 2012
From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu)
Date: Mon, 14 May 2012 14:15:23 -0700
Subject: Problem svgdev SNF 2012-05-14 14:15:22: track problem
Message-ID: <mailman.913.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Track ran 2 wafers just fine and then would hang up after bake step. Required track to be reset. Problem occured two consecutive times. Switched over to svgdev2. 
Recipe used:
Develop #5
Bake #1



From vilanova at snf.stanford.edu  Tue May 15 08:44:05 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 15 May 2012 08:44:05 -0700
Subject: Problem svgdev SNF 2012-05-14 14:15:22: track problem
Message-ID: <mailman.914.1357938758.25901.svgdev-pcs@snf.stanford.edu>

Cycled many wafers several times Using the same Recipe
( prograM # 5 , BAKe # 1) and I could Not  Repeat
the user problem, I also ran the asml quals wafers without any
errors,System tested and  ok to use