From sminne at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: Apr 19, 2000 Subject: Problem svgdev: input loader doesn't start Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 20, 2000 Subject: Problem Clear svgdev: Message-ID: cycled wafers, npf. From aaronp at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Apr 29, 2000 Subject: Problem svgdev: no 26W resist Message-ID: From prisbe at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 1, 2000 Subject: Problem Clear svgdev: developer Message-ID: Tony will restock yellow cabinet From prisbe at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 1, 2000 Subject: Problem Clear svgdev: no problem found Message-ID: no problem found From crozier at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: crozier at snf.stanford.edu (crozier at snf.stanford.edu) Date: May 8, 2000 Subject: Problem svgdev: smashed my wafer Message-ID: From crozier at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: crozier at snf.stanford.edu (crozier at snf.stanford.edu) Date: May 8, 2000 Subject: Problem svgdev: Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 9, 2000 Subject: Problem Clear svgdev: Message-ID: Perform weekly PM cycle wafers ready for Use. From vilanova at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 9, 2000 Subject: Problem Clear svgdev: Message-ID: From amycc at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: amycc at snf.stanford.edu (amycc at snf.stanford.edu) Date: Aug 2, 2000 Subject: Problem svgdev: Message-ID: My wafer broke in the developer. It was an etch-thru wafer with blue tape on the back. During final rinse or dry spin (program 6), apparently the wafer flew off, having lost vaccum seal. I stopped the developer and picked up what pieces I could with tweezer but majority of it is still inside the bowl. Amy From martinez at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 28, 2000 Subject: Problem Clear svgdev: Message-ID: cleaned broken wafer, tested ok. From bclee79 at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: bclee79 at snf.stanford.edu (bclee79 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Problem svgdev SNF 2012-09-05 23:47:31: Lost of my sample Message-ID: <9370079.49.1346914051878.JavaMail.coral@shine> I lost my sample during the final spin and it was broken into small pieces. They were stuck on the white guiding block and the chuck. From vilanova at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Shutdown svgdev SNF 2012-09-06 09:19:38: shutdown Message-ID: <16714103.51.1346948379370.JavaMail.coral@shine> From vilanova at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Problem svgdev SNF 2012-09-05 23:47:31: Lost of my sample Message-ID: <20105961.54.1346956628886.JavaMail.coral@shine> Removed Broken wafer pieces and cleaned catch cup chuck and belts, Replaced Defective wafer transfer Board, Calibrated Spindle. Cycled all dummy wafers, All Operations Ok, Good to use. From vilanova at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Shutdown svgdev SNF 2012-09-06 09:19:38: shutdown Message-ID: <20459342.55.1346956650895.JavaMail.coral@shine> Removed Broken wafer pieces and cleaned catch cup chuck and belts, Replaced Defective wafer transfer Board, Calibrated Spindle. Cycled all dummy wafers, All Operations Ok, Good to use. From vilanova at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Shutdown svgdev SNF 2012-10-10 02:38:50: Fail to reset the track Message-ID: <29951561.40.1349881011881.JavaMail.coral@shine> Track Working Fine, Couldnt Repeat the User Error. Initialized System and Cycled Lots Of wafers, Track Ok and Ready to use. From fpurkl at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Problem svgdev SNF 2012-10-17 19:34:53: wafer getting stuck on hotplate Message-ID: <25168020.16.1350527694953.JavaMail.coral@shine> Intermittently, the track couldn't lift a wafer from the hot plate. It looked like the vacuum was still on when trying to lift up the wafer. No alarm was produced but everything stopped. This was for bake recipe 1 (60s). From vilanova at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Problem svgdev SNF 2012-10-17 19:34:53: wafer getting stuck on hotplate Message-ID: <29188904.24.1350572121239.JavaMail.coral@shine> I 've ran a lot of wafers Using the same recipe, Couldnt repeat the user Problem, Hotplate Is clean and programs are working Fine, Ok to use From cbellew at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Problem svgdev SNF 2012-12-03 22:46:39: send indexer problem Message-ID: <20879656.43.1354603600595.JavaMail.coral@shine> the send indexer stopped going down. had to run in manual mode. From vilanova at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Problem svgdev SNF 2012-12-03 22:46:39: send indexer problem Message-ID: <9179605.52.1354638692300.JavaMail.coral@shine> Indexer Elevator got stuck On the bottom position, Lubricated elevator rails and Tested , Cycled 18 wafers 3 times , Elevator and wafers ok Good to use. From gsosa at snf.stanford.edu Fri Jan 11 13:12:31 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:12:31 -0000 Subject: Comment svgdev SNF 2012-12-05 07:40:05: Badger Install 12/4 Message-ID: <24003025.65.1354722006021.JavaMail.coral@shine> Installed and tested Badger interlock box.