From martinez at snf.stanford.edu  Thu Jun  2 16:47:38 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Thu, 02 Jun 2005 16:47:38 -0700
Subject: broken nozzle
Message-ID: <429F9A9A.4010306@snf.stanford.edu>

the back side rinse nozzle has been broken off
wafers processed on this track must be rinsed in the spin-rinse-dryer
after dev.
we should have a replacement by 6/3/05