From franklin at snf.stanford.edu  Tue Dec 12 12:01:29 2000
From: franklin at snf.stanford.edu (franklin at snf.stanford.edu)
Date: Dec 12, 2000 12:01:29 PM
Subject: Problem svgdev2: loss of wafer vac
Message-ID: <mailman.44.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

I had the same problem as I had before with the Karl Suss.  When you load you wafer in on the wafer tray and it tries WEC it says loss of wafer vac press enter to continue.  If you continue you get poor resolution of ~2u features and rounded edges.



From vilanova at snf.stanford.edu  Tue Dec 12 02:43:48 2000
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 12, 2000 2:43:48 PM
Subject: Problem svgdev2: Weekly PM Performed, Working Ok , ready to use
Message-ID: <mailman.45.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

Weekly PM Performed , Working Ok , Ready to Use.