Problem svgdev2: loss of wafer vac

franklin at snf.stanford.edu franklin at snf.stanford.edu
Tue Dec 12 12:01:29 PST 2000


I had the same problem as I had before with the Karl Suss.  When you load you wafer in on the wafer tray and it tries WEC it says loss of wafer vac press enter to continue.  If you continue you get poor resolution of ~2u features and rounded edges.




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