From martinez at snf.stanford.edu Tue Nov 7 07:50:57 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 7, 2000 7:50:57 AM Subject: Shutdown svgdev2: shutdown this track Message-ID: belt replacement & hot plate cal From vilanova at snf.stanford.edu Tue Nov 7 11:10:55 2000 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 7, 2000 11:10:55 AM Subject: Shutdown Clear svgdev2: replaced belts, tested ok to use Message-ID: From ericp at snf.stanford.edu Tue Nov 7 11:38:32 2000 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Nov 7, 2000 11:38:32 AM Subject: Problem svgdev2: sensor on load station Message-ID: Sensor on load station does not sense wafer, so it drops the entire cassette weight onto the bottom wafer and stops when the cassette-present sensor unloads. From martinez at snf.stanford.edu Tue Nov 7 01:52:17 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 7, 2000 1:52:17 PM Subject: Problem Clear svgdev2: npf Message-ID: cycled wafers, npf.