From gyama at snf.stanford.edu  Fri Aug  3 01:01:43 2001
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Aug 3, 2001 1:01:43 PM
Subject: Problem svgdev2 2001-08-03 13:01:40: leaves dev on backside
Message-ID: <mailman.65.1357938776.25913.svgdev2-pcs@snf.stanford.edu>




From fama at snf.stanford.edu  Mon Aug  6 01:15:37 2001
From: fama at snf.stanford.edu (fama at snf.stanford.edu)
Date: Aug 6, 2001 1:15:37 AM
Subject: Problem svgdev2 2001-08-06 01:15:35: Dribbling
Message-ID: <mailman.66.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

Developer dribbled fluid on one of my wafers after final spin.  The fluid destroyed my wafer by burning a hole in the adjacent resist.



From vilanova at snf.stanford.edu  Mon Aug  6 08:10:22 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Aug 6, 2001 8:10:22 AM
Subject: Problem svgdev2 2001-08-03 13:01:40: leaves dev on backside
Message-ID: <mailman.67.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

The Canister was out of Developer, Developer Added,
Nozzle MOved to normal position. NO more Developer 
on backside, Tested it, Ok to use



From vilanova at snf.stanford.edu  Mon Aug  6 08:10:55 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Aug 6, 2001 8:10:55 AM
Subject: Problem svgdev2 2001-08-06 01:15:35: Dribbling
Message-ID: <mailman.68.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

Developer Added to Canister