From franklin at snf.stanford.edu  Wed Mar 21 10:15:45 2001
From: franklin at snf.stanford.edu (franklin at snf.stanford.edu)
Date: Mar 21, 2001 10:15:45 AM
Subject: Problem svgdev2 2001-03-21 10:15:43: stops during develop
Message-ID: <mailman.50.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

Developer stopped during final development step.  Left developer on wafer.  Machine just hung on step 7 of program 4.  Recommend you use svgdev for now.



From vilanova at snf.stanford.edu  Wed Mar 21 11:26:21 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 21, 2001 11:26:21 AM
Subject: Problem svgdev2 2001-03-21 10:15:43: Chuck out of position, Cleaned tested ok to use
Message-ID: <mailman.51.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

Cleaned, tested, ok to use



From lgx at snf.stanford.edu  Sun Mar 25 05:33:02 2001
From: lgx at snf.stanford.edu (lgx at snf.stanford.edu)
Date: Mar 25, 2001 5:33:02 PM
Subject: Problem svgdev2 2001-03-25 17:33:01: Auto mode fails
Message-ID: <mailman.52.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

The Auto mode fails. The wafer cannot be transferred.



From vilanova at snf.stanford.edu  Mon Mar 26 07:00:29 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 26, 2001 7:00:29 AM
Subject: Problem svgdev2 2001-03-25 17:33:01: Auto Mode Working Ok, User Error
Message-ID: <mailman.53.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

Auto Mode Working Ok, User Error, Ok to use