From suzanne at snf.stanford.edu Wed May 16 12:59:46 2001 From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu) Date: May 16, 2001 12:59:46 PM Subject: Problem svgdev2 2001-05-16 12:59:45: svgdev Message-ID: have to use manually..wafer will not move from cassette From mahnaz at snf.stanford.edu Thu May 17 10:23:29 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: May 17, 2001 10:23:29 AM Subject: Problem svgdev2 2001-05-16 12:59:45: svgdev Message-ID: reset the system and fiddile around with it, working ok but mike will check the system. From suzanne at snf.stanford.edu Fri May 18 10:11:40 2001 From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu) Date: May 18, 2001 10:11:40 AM Subject: Problem svgdev2 2001-05-18 10:11:38: svg2 Message-ID: developer not dispensing properly....sporadically wll not deposit develop.. From pzwahlen at snf.stanford.edu Fri May 18 10:52:00 2001 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: May 18, 2001 10:52:00 AM Subject: Shutdown svgdev2 2001-05-18 10:51:59: Developper nozzle is splashing developper randomly Message-ID: From martinez at snf.stanford.edu Mon May 21 12:09:59 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 21, 2001 12:09:59 PM Subject: Shutdown svgdev2 2001-05-18 10:51:59: Developper nozzle is splashing developper randomly Message-ID: cycled 6 wafers prog#2, 3, 4. both dev and rinse cycles are working properly. no problem found. ready for use. From martinez at snf.stanford.edu Mon May 21 12:10:20 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 21, 2001 12:10:20 PM Subject: Problem svgdev2 2001-05-18 10:11:38: svg2 Message-ID: npf