Shutdown svgdev2 2001-05-18 10:51:59: Developper nozzle is splashing developper randomly

martinez at snf.stanford.edu martinez at snf.stanford.edu
Mon May 21 12:09:59 PDT 2001


cycled 6 wafers prog#2, 3, 4. both dev and rinse cycles are
working properly. no problem found. ready for use.




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