From frankliu at snf.stanford.edu Wed Sep 5 12:16:04 2001 From: frankliu at snf.stanford.edu (frankliu at snf.stanford.edu) Date: Sep 5, 2001 12:16:04 PM Subject: Problem svgdev2 2001-09-05 12:16:00: Splash Message-ID: There were a few drops of liquid on my top wafer and also on wafers beneath it (although only at the wafer lip). I can trace a stream coming from the right, but I can't pin point the source. There are other droplets forming roughly a straight line from the first station to the wafer loader. It might be dry by the time someone comes to take a look... For users I would suggest protecting your wafers with a few dummies on top. From frankliu at snf.stanford.edu Wed Sep 5 12:21:44 2001 From: frankliu at snf.stanford.edu (frankliu at snf.stanford.edu) Date: Sep 5, 2001 12:21:44 PM Subject: Problem svgdev2 2001-09-05 12:21:35: Splash II Message-ID: Looks like the liquid is coming from below, there is a T-section which seems to have some lose hoses, and that may be a possible source of gushing liquid. From martinez at snf.stanford.edu Thu Sep 6 02:57:38 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 6, 2001 2:57:38 PM Subject: Problem svgdev2 2001-09-05 12:21:35: Splash II Message-ID: tightened rinse line fitting. cycled test wafers. ok to use From martinez at snf.stanford.edu Thu Sep 6 02:58:12 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 6, 2001 2:58:12 PM Subject: Problem svgdev2 2001-09-05 12:16:00: Splash Message-ID: tightened rinse water fitting. cycled test wafers.