From vilanova at snf.stanford.edu  Tue Jul  9 06:19:42 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jul 9, 2002 6:19:42 AM
Subject: Shutdown svgdev2 2002-07-09 06:19:41: exhaust maintenance
Message-ID: <mailman.112.1357938777.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Jul  9 08:27:57 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jul 9, 2002 8:27:57 AM
Subject: Shutdown svgdev2 2002-07-09 06:19:41: exhaust maintenance
Message-ID: <mailman.113.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

Exhaust maintenance Completed



From martinez at snf.stanford.edu  Wed Jul 10 01:42:57 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Jul 10, 2002 1:42:57 PM
Subject: Shutdown svgdev2 2002-07-10 13:42:56: wpm
Message-ID: <mailman.114.1357938777.25913.svgdev2-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Wed Jul 10 02:44:57 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Jul 10, 2002 2:44:57 PM
Subject: Shutdown svgdev2 2002-07-10 13:42:56: wpm
Message-ID: <mailman.115.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

weekly pm done



From vilanova at snf.stanford.edu  Fri Jul 19 10:44:09 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jul 19, 2002 10:44:09 AM
Subject: Shutdown svgdev2 2002-07-19 10:44:08: Weekly Pm in progress
Message-ID: <mailman.116.1357938777.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Jul 19 01:20:47 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jul 19, 2002 1:20:47 PM
Subject: Shutdown svgdev2 2002-07-19 10:44:08: Weekly Pm in progress
Message-ID: <mailman.117.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

weekly Pm completed



From ferrera at snf.stanford.edu  Sun Jul 21 08:49:10 2002
From: ferrera at snf.stanford.edu (ferrera at snf.stanford.edu)
Date: Jul 21, 2002 8:49:10 PM
Subject: Comment svgdev2 2002-07-21 20:49:09: developer tank empty
Message-ID: <mailman.118.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

Previous user let the developer tank empty and did not refill it.



From ferrera at snf.stanford.edu  Sun Jul 21 08:50:08 2002
From: ferrera at snf.stanford.edu (ferrera at snf.stanford.edu)
Date: Jul 21, 2002 8:50:08 PM
Subject: Shutdown svgdev2 2002-07-21 20:50:08: broken wafer in spinner
Message-ID: <mailman.119.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

Wafer did not locate properly on spinner chuck and broke when spinner started.



From vilanova at snf.stanford.edu  Mon Jul 22 08:01:38 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jul 22, 2002 8:01:38 AM
Subject: Shutdown svgdev2 2002-07-21 20:50:08: broken wafer in spinner
Message-ID: <mailman.120.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

Removed broken wafer, cleaned chuck & catchcup ,Weekly Pm Completed, tested , working ok , ready to use.