From yongli at snf.stanford.edu  Tue Mar 12 04:48:50 2002
From: yongli at snf.stanford.edu (yongli at snf.stanford.edu)
Date: Mar 12, 2002 4:48:50 PM
Subject: Problem svgdev2 2002-03-12 16:48:48: Stop in the mid process
Message-ID: <mailman.86.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

The SVGdev2 stop in the mid of the process.  I do not know how to fix it. I disabled the machine after pickup my wafers.



From martinez at snf.stanford.edu  Wed Mar 13 08:06:19 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Mar 13, 2002 8:06:19 AM
Subject: Problem svgdev2 2002-03-12 16:48:48: Stop in the mid process
Message-ID: <mailman.87.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

cycled wafers dev program #3 bake program #1
no problem found. ready for use



From vilanova at snf.stanford.edu  Tue Mar 26 10:40:40 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 26, 2002 10:40:40 AM
Subject: Shutdown svgdev2 2002-03-26 10:40:40: PM In Progress
Message-ID: <mailman.88.1357938776.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Mar 26 11:41:16 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 26, 2002 11:41:16 AM
Subject: Shutdown svgdev2 2002-03-26 10:40:40: PM In Progress
Message-ID: <mailman.89.1357938776.25913.svgdev2-pcs@snf.stanford.edu>

Preventive Maintenance Completed