From gyama at snf.stanford.edu Wed Apr 9 09:53:59 2003 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Apr 9, 2003 9:53:59 AM Subject: Problem svgdev2 2003-04-09 09:53:58: Report Problem for svgdev2 Message-ID: belts not turning in auto mode From charley at snf.stanford.edu Wed Apr 9 04:13:02 2003 From: charley at snf.stanford.edu (charley at snf.stanford.edu) Date: Apr 9, 2003 4:13:02 PM Subject: Problem svgdev2 2003-04-09 09:53:58: Report Clear for svgdev2 Message-ID: Dev 2 will run now, also, but indexer doesn't work correctly so you must use manual mode. From mahnaz at snf.stanford.edu Tue Apr 15 03:08:44 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Apr 15, 2003 3:08:44 PM Subject: Problem svgdev2 2003-04-15 15:08:44: Report Problem for svgdev2 Message-ID: chuck is not flat, part of my wafers never gets any developer. tried two wafers already. From vilanova at snf.stanford.edu Wed Apr 16 07:58:50 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 16, 2003 7:58:50 AM Subject: Problem svgdev2 2003-04-15 15:08:44: Report Clear for svgdev2 Message-ID: I've increased the Developer flow . ran some wafers and they all look fine. ok to use. From vilanova at snf.stanford.edu Wed Apr 16 10:21:08 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 16, 2003 10:21:08 AM Subject: Shutdown svgdev2 2003-04-16 10:21:07: Report Shutdown for svgdev2 Message-ID: Maintenance upgrade in progress .......... Stay tune From martinez at snf.stanford.edu Wed Apr 16 04:46:41 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 16, 2003 4:46:41 PM Subject: Shutdown svgdev2 2003-04-16 10:21:07: Report Clear for svgdev2 Message-ID: air sensor installation completed & tested. ready for use