From true at snf.stanford.edu  Wed Jan 22 02:05:18 2003
From: true at snf.stanford.edu (true at snf.stanford.edu)
Date: Jan 22, 2003 2:05:18 PM
Subject: Problem svgdev2 2003-01-22 14:05:18: particles
Message-ID: <mailman.165.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

lots of particles on my wafers after coating



From vilanova at snf.stanford.edu  Thu Jan 23 07:16:39 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jan 23, 2003 7:16:39 AM
Subject: Shutdown svgdev2 2003-01-23 07:16:38: Weekly Pm In progress...................
Message-ID: <mailman.166.1357938777.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Jan 23 07:54:39 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jan 23, 2003 7:54:39 AM
Subject: Problem svgdev2 2003-01-22 14:05:18: particles
Message-ID: <mailman.167.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

No particles found before or after completing
Weekly Pm, Ready to use. 



From vilanova at snf.stanford.edu  Thu Jan 23 07:55:05 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jan 23, 2003 7:55:05 AM
Subject: Shutdown svgdev2 2003-01-23 07:16:38: Weekly Pm In progress...................
Message-ID: <mailman.168.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

Weekly Pm Completed , Ready to Use.