From vilanova at snf.stanford.edu  Tue Mar  4 01:24:07 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 4, 2003 1:24:07 PM
Subject: Shutdown svgdev2 2003-03-04 13:24:07: Report Shutdown for svgdev2
Message-ID: <mailman.169.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

Weekly Maintenance Routine. 



From vilanova at snf.stanford.edu  Tue Mar  4 02:18:07 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 4, 2003 2:18:07 PM
Subject: Shutdown svgdev2 2003-03-04 13:24:07: Report Clear for svgdev2
Message-ID: <mailman.170.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

Weekly Maintenance Completed. 



From evelyn at snf.stanford.edu  Wed Mar  5 10:14:36 2003
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Mar 5, 2003 10:14:36 AM
Subject: Problem svgdev2 2003-03-05 10:14:35: Report Problem for svgdev2
Message-ID: <mailman.171.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

chuck won't release wafer so resist can flow on wafer



From vilanova at snf.stanford.edu  Wed Mar  5 02:16:58 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 5, 2003 2:16:58 PM
Subject: Problem svgdev2 2003-03-05 10:14:35: Report Clear for svgdev2
Message-ID: <mailman.172.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

Adjusted wafer sensor, tested  ok, ready to use.