From mahnaz at snf.stanford.edu Wed Nov 5 11:16:12 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 Nov 2003 11:16:12 -0800 Subject: Problem svgdev2 2003-11-05 11:16:12: it needs to be centered Message-ID: running prog #6 , it does not look good. From vilanova at snf.stanford.edu Wed Nov 5 14:08:26 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Nov 2003 14:08:26 -0800 Subject: Problem svgdev2 2003-11-05 11:16:12: it needs to be centered Message-ID: found the programs changed, checked centering ok, ok to use. From mahnaz at snf.stanford.edu Mon Nov 10 15:27:01 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Nov 2003 15:27:01 -0800 Subject: Problem svgdev2 2003-11-10 15:27:00: Needs to be leveled Message-ID: It is not performing as svgdev with prog 6 and 7. I will be more than happy to demonstrate the problem. From vilanova at snf.stanford.edu Tue Nov 11 08:04:23 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 11 Nov 2003 08:04:23 -0800 Subject: Problem svgdev2 2003-11-10 15:27:00: Needs to be leveled Message-ID: Leveled centering tabs , tested , ready to use. From mahnaz at snf.stanford.edu Tue Nov 11 10:00:29 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 11 Nov 2003 10:00:29 -0800 Subject: Problem svgdev2 2003-11-11 10:00:28: chuck needs to be leveled Message-ID: Please do not clear the problem . There is a problem with recipe #6 and 7. From martinez at snf.stanford.edu Tue Nov 11 10:38:46 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 11 Nov 2003 10:38:46 -0800 Subject: Problem svgdev2 2003-11-11 10:00:28: chuck needs to be leveled Message-ID: checked chuck level - NPF adj program step#1 from stream to spray cycled wafers (5) no breaks in surface coverage ready for use From sjain at snf.stanford.edu Sun Nov 16 01:42:25 2003 From: sjain at snf.stanford.edu (sjain at snf.stanford.edu) Date: Sun, 16 Nov 2003 01:42:25 -0800 Subject: Problem svgdev2 2003-11-16 01:42:23: track over the hot plate does not move sometimes Message-ID: Hi, the track above teh hot plate has stopped moving (even when it does occasionally move, it is very sporadic). need to transfer wafers manually across teh track. From vilanova at snf.stanford.edu Mon Nov 17 11:52:58 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Nov 2003 11:52:58 -0800 Subject: Shutdown svgdev2 2003-11-17 11:52:57: Report Shutdown for svgdev2 Message-ID: while replacing motor found a broken pulley. I need to go get a new one and Installed , stay tuned. From martinez at snf.stanford.edu Tue Nov 18 15:55:51 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 18 Nov 2003 15:55:51 -0800 Subject: Shutdown svgdev2 2003-11-17 11:52:57: Report Shutdown for svgdev2 Message-ID: replaced wafer transport guide cable, adj in/out sensors adj rail height, replaced rail pulley, replaced transfer motor calibrated hot plate. cycled ten wafers. ready for use From martinez at snf.stanford.edu Tue Nov 18 15:56:13 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 18 Nov 2003 15:56:13 -0800 Subject: Problem svgdev2 2003-11-16 01:42:23: track over the hot plate does not move sometimes Message-ID: problem cleared