Problem svgdev2 2003-11-16 01:42:23: track over the hot plate does not move sometimes

sjain at snf.stanford.edu sjain at snf.stanford.edu
Sun Nov 16 01:42:25 PST 2003


Hi,
    the track above teh hot plate has stopped moving (even when it does occasionally move, it is very sporadic). need to transfer wafers manually across teh track.




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