Shutdown svgdev2 2003-11-17 11:52:57: Report Shutdown for svgdev2

martinez at snf.stanford.edu martinez at snf.stanford.edu
Tue Nov 18 15:55:51 PST 2003


replaced wafer transport guide cable, adj in/out sensors
adj rail height, replaced rail pulley, replaced transfer motor
calibrated hot plate. cycled ten wafers. ready for use




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