From pnataraj at snf.stanford.edu  Wed Sep 17 09:34:46 2003
From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu)
Date: Sep 17, 2003 9:34:46 PM
Subject: Problem svgdev2 2003-09-17 21:34:45: Report Problem for svgdev2
Message-ID: <mailman.191.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

wafer stuck in the developer chamber.Starting might cause wafer to break inside the develpoer container.



From vilanova at snf.stanford.edu  Thu Sep 18 07:31:52 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sep 18, 2003 7:31:52 AM
Subject: Problem svgdev2 2003-09-17 21:34:45: Report Clear for svgdev2
Message-ID: <mailman.192.1357938777.25913.svgdev2-pcs@snf.stanford.edu>

ran several wafers , track  working fine, operator error
ok to use.