From sjo at snf.stanford.edu Sat Aug 7 18:49:43 2004 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Sat, 7 Aug 2004 18:49:43 -0700 Subject: Problem svgdev2 SNF 2004-08-07 18:49:43: Won't pass wafer to bake station Message-ID: The developer and bake station seem to be out of sync. None of my wafers were passed on to the bake station, they stopped two inches before leaving the develop station. Also the indexer at the beginning seemed a bit strange, it wouldn't lift the casette up when I hit "index reset". Only when I slightly touched the casette would the indexer suddenly start to lift out. Maybe it has some intermittent sensor/contact problem? From vilanova at snf.stanford.edu Mon Aug 9 07:50:02 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Aug 2004 07:50:02 -0700 Subject: Problem svgdev2 SNF 2004-08-07 18:49:43: Won't pass wafer to bake station Message-ID: the canister was out of developer , added developer to it cycled wafers , ready to go . From ratiug at snf.stanford.edu Sat Aug 14 22:03:20 2004 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Sat, 14 Aug 2004 22:03:20 -0700 Subject: Problem svgdev2 SNF 2004-08-14 22:03:19: Dummy wafer broken Message-ID: When I run a test development, the dummy wafer was broken in the tank. Please help to move it. I can't reach the bottom of the tank. From vilanova at snf.stanford.edu Mon Aug 16 07:51:35 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Aug 2004 07:51:35 -0700 Subject: Problem svgdev2 SNF 2004-08-14 22:03:19: Dummy wafer broken Message-ID: cleaned ,Removed broken wafer . ok to use.