From vilanova at snf.stanford.edu Mon Feb 2 07:47:57 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Feb 2004 07:47:57 -0800 Subject: Problem svgdev2 2004-01-31 11:15:10: Broken Wafer Message-ID: removed broken wafer and cleaned catch cup. :-) From vilanova at snf.stanford.edu Tue Feb 3 10:04:49 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Feb 2004 10:04:49 -0800 Subject: Shutdown svgdev2 2004-02-03 10:04:48: Message-ID: From vilanova at snf.stanford.edu Tue Feb 3 10:41:37 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Feb 2004 10:41:37 -0800 Subject: Shutdown svgdev2 2004-02-03 10:04:48: Message-ID: Weekly Maintenance Completed, ready to use. :-) From aag at snf.stanford.edu Wed Feb 4 13:37:50 2004 From: aag at snf.stanford.edu (aag at snf.stanford.edu) Date: Wed, 4 Feb 2004 13:37:50 -0800 Subject: Comment svgdev2 2004-02-04 13:37:47: poor vacuum on spinner Message-ID: bowl never came up From vilanova at snf.stanford.edu Thu Feb 5 06:38:43 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Feb 2004 06:38:43 -0800 Subject: Comment svgdev2 2004-02-04 13:37:47: poor vacuum on spinner Message-ID: I Took care of this problem yesterday afternoon . Ok to use . From calarrudo at snf.stanford.edu Tue Feb 17 17:11:09 2004 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 17 Feb 2004 17:11:09 -0800 Subject: Problem svgdev2 2004-02-17 17:11:08: Wafer offset during develop cycle Message-ID: My wafer was offset when it was loaded onto the develop chuck. I thought it was going to fly off the chuck during the spin cycle. From vilanova at snf.stanford.edu Wed Feb 18 07:53:08 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Feb 2004 07:53:08 -0800 Subject: Problem svgdev2 2004-02-17 17:11:08: Wafer offset during develop cycle Message-ID: adjusted chuck , cycled wafers , ok to use . From hanjun at snf.stanford.edu Wed Feb 18 15:48:10 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Wed, 18 Feb 2004 15:48:10 -0800 Subject: Problem svgdev2 2004-02-18 15:48:10: rinser broke a wafer Message-ID: maybe a vacuuming problem of the rinse chuck... From vilanova at snf.stanford.edu Thu Feb 19 08:22:16 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 19 Feb 2004 08:22:16 -0800 Subject: Problem svgdev2 2004-02-18 15:48:10: rinser broke a wafer Message-ID: removed broken pieces cleaned catch cup , weekly maintenance compelted , cycled wafers , ready to use. From harshal at snf.stanford.edu Fri Feb 27 12:52:30 2004 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Fri, 27 Feb 2004 12:52:30 -0800 Subject: Problem svgdev2 2004-02-27 12:52:30: wafer off centered on the developer chuck. Message-ID: wafer broke when it got off cetered on the developer probably due to the tracks not coming together enough. From vilanova at snf.stanford.edu Fri Feb 27 14:50:16 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 27 Feb 2004 14:50:16 -0800 Subject: Problem svgdev2 2004-02-27 12:52:30: wafer off centered on the developer chuck. Message-ID: weekly maintenance routine removed borken wafer, cleaned catch cup , centered chuck , cycled wafers. Ok to use . :=) From mlacolle at snf.stanford.edu Fri Feb 27 15:24:09 2004 From: mlacolle at snf.stanford.edu (mlacolle at snf.stanford.edu) Date: Fri, 27 Feb 2004 15:24:09 -0800 Subject: Problem svgdev2 2004-02-27 15:24:08: wafer not spinning Message-ID: My wafer was not spinning From mahnaz at snf.stanford.edu Fri Feb 27 15:38:10 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 27 Feb 2004 15:38:10 -0800 Subject: Shutdown svgdev2 2004-02-27 15:38:10: not dispensing enough developer Message-ID: From martinez at snf.stanford.edu Fri Feb 27 16:16:00 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 27 Feb 2004 16:16:00 -0800 Subject: Shutdown svgdev2 2004-02-27 15:38:10: not dispensing enough developer Message-ID: adj dev flow cycled thick resist wafer. coverage looks good