Problem svgdev2 2004-02-17 17:11:08: Wafer offset during develop cycle

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Tue Feb 17 17:11:09 PST 2004


My wafer was offset when it was loaded onto the develop 
chuck.  I thought it was going to fly off the chuck during the spin cycle.




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