Problem svgdev2 2004-02-27 12:52:30: wafer off centered on the developer chuck.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Feb 27 14:50:16 PST 2004


weekly maintenance routine  removed borken wafer, 
cleaned catch cup , centered chuck , cycled wafers.
Ok to use . :=) 




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